Quantitative phase imaging of thin film surface

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dc.authorscopusid55693651100
dc.authorscopusid16029234400
dc.authorscopusid6603478924
dc.contributor.authorTiryaki, Erhan
dc.contributor.authorKoçahan, Özlem
dc.contributor.authorÖzder, Serhat
dc.date.accessioned2022-05-11T14:03:20Z
dc.date.available2022-05-11T14:03:20Z
dc.date.issued2021
dc.departmentFakülteler, Fen Edebiyat Fakültesi, Fizik Bölümü
dc.description.abstractIn this study, the white light diffraction phase microscopy and the generalized Morse wavelet are proposed to achieve practical and precise measurement of a thin film surface. The white light diffraction phase microscopy provides low speckle noise and single-shot measurement, and thus it has been used to produce an image with interference fringes from the surface of a thin film. Relying on produced interferogram, quantitative phase information of the thin film surface has been obtained using the continuous wavelet transform. In the calculation of the quantitative phase, in many studies the continuous wavelet transform method with different wavelets is preferred. The Morlet wavelet is a commonly used one with a fixed resolution. An alternative approach is proposed using the generalized Morse wavelet capable of controlling the resolution. It has an additional advantage of varying the two parameters, thus improving the sensitivity of phase calculation. Results of the generalized Morse wavelet were compared with the Morlet and Paul wavelets which also have one varying parameter. For the determination of the thin film surface profile, besides the white light diffraction phase microscopy, surfaces have been investigated by a Dektak stylus profilometer and a scanning electron microscope. In this way, it was possible to observe the difference between the most commonly used methods with regard to the imaging of thin film surfaces. The application of the white light diffraction phase microscopy with the generalized Morse wavelet was compared with the common microscopy techniques for studying thin film surfaces, and experimental results were discussed at the end of the study. © 2021 Polish Academy of Sciences. All rights reserved.
dc.description.sponsorship120F325
dc.description.sponsorshipThis work was supported by the Tekirda? Nam?k Kemal University Scientific Research Project Commission (NKUBAP.01.GA.18.148) and the Turkish Scientific and Technical Research Council (TUBITAK-MFAG No 120F325).
dc.description.sponsorshipThis work was supported by the Tekirdağ Namık Kemal University Scientific Research Project Commission (NKUBAP.01.GA.18.148) and the Turkish Scientific and Technical Research Council (TUBITAK-MFAG No 120F325).
dc.identifier.doi10.12693/APhysPolA.140.281
dc.identifier.endpage287
dc.identifier.issn0587-4246
dc.identifier.issue3en_US
dc.identifier.scopus2-s2.0-85119604247
dc.identifier.scopusqualityQ4
dc.identifier.startpage281
dc.identifier.urihttps://doi.org/10.12693/APhysPolA.140.281
dc.identifier.urihttps://hdl.handle.net/20.500.11776/4673
dc.identifier.volume143
dc.identifier.wosWOS:000713033100013
dc.identifier.wosqualityQ4
dc.indekslendigikaynakWeb of Science
dc.indekslendigikaynakScopus
dc.institutionauthorKoçahan, Özlem
dc.language.isoen
dc.publisherPolska Akademia Nauk
dc.relation.ispartofActa Physica Polonica A
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanıen_US
dc.rightsinfo:eu-repo/semantics/openAccess
dc.subjectDiffraction phase microscopy
dc.subjectFringe analysis
dc.subjectGeneralized Morse wavelet
dc.subjectThin film surface
dc.subjectScanning electron microscopy
dc.subjectThin films
dc.subjectWavelet transforms
dc.subjectContinuous Wavelet Transform
dc.subjectDiffraction phase microscopy
dc.subjectFringes analysis
dc.subjectGeneralized morse wavelet
dc.subjectLight diffraction
dc.subjectMorlet Wavelet
dc.subjectPrecise measurements
dc.subjectQuantitative phase imaging
dc.subjectThin film surfaces
dc.subjectWhite light
dc.subjectDiffraction
dc.titleQuantitative phase imaging of thin film surface
dc.typeArticle

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