Micromachined Silicon Acoustic Delay Lines for High-Frequency Ultrasound Sensing and Imaging

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dc.authoridUstun, Arif Kivanc/0000-0002-9336-7930
dc.contributor.authorUstun, Arif Kivanc
dc.contributor.authorZou, Jun
dc.date.accessioned2024-10-29T17:58:16Z
dc.date.available2024-10-29T17:58:16Z
dc.date.issued2024
dc.departmentTekirdağ Namık Kemal Üniversitesi
dc.descriptionSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) -- JUN 02-05, 2024 -- Dresden, GERMANY
dc.description.abstractThis paper reports a new micromachined silicon acoustic delay line (SADL) design for transmitting high-frequency ultrasound signals while adding a certain amount of true time delay. Compared to traditional structures, with the use of a novel thin-film backside linker, the new SADL design can significantly increase the mechanical stiffness of the SADL structure for easy handling and assembly without degrading its acoustic performance. It can be easily scaled up or down to provide different ultrasound frequency response and time delays. For demonstration, high-frequency ultrasound transmission through a multi-channel SADL array has been successfully achieved. The new SADL design could provide a new practical approach for the development of high-frequency ultrasound arrays for high-resolution and high-speed ultrasound sensing & imaging applications.
dc.identifier.doi10.1109/DTIP62575.2024.10613166
dc.identifier.isbn979-8-3503-7827-6
dc.identifier.isbn979-8-3503-7826-9
dc.identifier.issn2836-8487
dc.identifier.scopus2-s2.0-85202353935
dc.identifier.scopusqualityN/A
dc.identifier.urihttps://doi.org/10.1109/DTIP62575.2024.10613166
dc.identifier.urihttps://hdl.handle.net/20.500.11776/14166
dc.identifier.wosWOS:001293786100016
dc.identifier.wosqualityN/A
dc.indekslendigikaynakWeb of Science
dc.indekslendigikaynakScopus
dc.language.isoen
dc.publisherIEEE
dc.relation.ispartof2024 Symposium on Design, Test, Integration and Packaging of Mems/Moems, Dtip 2024
dc.relation.publicationcategoryKonferans Öğesi - Uluslararası - Kurum Öğretim Elemanıen_US
dc.rightsinfo:eu-repo/semantics/closedAccess
dc.subjectAcoustic delay lines
dc.subjectmicrofabrication
dc.subjectmechanical stiffness
dc.subjectbulk silicon
dc.titleMicromachined Silicon Acoustic Delay Lines for High-Frequency Ultrasound Sensing and Imaging
dc.typeConference Object

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