Konu "e-beam evaporation technique" için Fakülteler listeleme
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Investigation of structural and electrical properties of flat a-Si/c-Si heterostructure fabricated by EBPVD technique
(American Institute of Physics Inc., 2013)Flat amorphous silicon - crystal silicon (a-Si/c-Si) heterostructure were prepared by ultra-high vacuum electron beam evaporation technique on p-Si (111) and n-Si (100) single crystal substrates. Structural analyses were ...